Sequential shrink photolithography for plastic microlens arrays

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چکیده

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Sequential shrink photolithography for plastic microlens arrays.

Endeavoring to push the boundaries of microfabrication with shrinkable polymers, we have developed a sequential shrink photolithography process. We demonstrate the utility of this approach by rapidly fabricating plastic microlens arrays. First, we create a mask out of the children's toy Shrinky Dinks by simply printing dots using a standard desktop printer. Upon retraction of this pre-stressed ...

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ژورنال

عنوان ژورنال: Applied Physics Letters

سال: 2011

ISSN: 0003-6951,1077-3118

DOI: 10.1063/1.3609322